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Hodnocení vlastností tenkých vrstev TiCN

Citace: [] BLÁHOVÁ, O., FAJKUS, M., HOŘEJŠ, S., BURŠÍKOVÁ, V. Hodnocení vlastností tenkých vrstev TiCN. In 21. dny tepelného zpracování. Praha: Asociace pro tepelné zpracování kovů, 2006. s. 227-234. ISBN: 80-239-7840-3
Druh: STAŤ VE SBORNÍKU
Jazyk publikace: cze
Anglický název: Evaluation of properties of thin films TiCN
Rok vydání: 2006
Místo konání: Praha
Název zdroje: Asociace pro tepelné zpracování kovů
Autoři: Olga Bláhová , Miroslav Fajkus , Slavomír Hořejš , Vilma Buršíková
Abstrakt CZ: The paper is focused on problems of evaluation microstructure and mechanical properties of thin wear resistance layers TiCN deposited with PVD, CVD and PA CVD using. The chemical constitution, thickness, roughness, nanoindentation and tribological measurements were discussed. The nanoindentation were provided by FISCHERSCOPE H100 and Nano Indenter XP. The tribological measurements were provided by high temperature tribometer CSEM Instruments using method pin-on-disc. The wear tracks were examined by SEM with EDAX.
Abstrakt EN: The paper is focused on problems of evaluation microstructure and mechanical properties of thin wear resistance layers TiCN deposited with PVD, CVD and PA CVD using. The chemical constitution, thickness, roughness, nanoindentation and tribological measurements were discussed. The nanoindentation were provided by FISCHERSCOPE H100 and Nano Indenter XP. The tribological measurements were provided by high temperature tribometer CSEM Instruments using method pin-on-disc. The wear tracks were examined by SEM with EDAX.
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