Přejít k obsahu


Hydrogenated silicon absorber layers for thin film solar cells deposited from hydrogen diluted silane using a layer-by-layer approach

Citace: [] VAN ELZAKKER, G., MÜLLEROVÁ, J., ŠUTTA, P., ZEMAN, M. Hydrogenated silicon absorber layers for thin film solar cells deposited from hydrogen diluted silane using a layer-by-layer approach. In Proceedings of the 22nd European Photovoltaic Solar Energy Conference. Munich: WIP, 2007. s. 2161-2164.
Druh: STAŤ VE SBORNÍKU
Jazyk publikace: eng
Anglický název: Hydrogenated silicon absorber layers for thin film solar cells deposited from hydrogen diluted silane using a layer-by-layer approach
Rok vydání: 2007
Místo konání: Munich
Název zdroje: WIP
Autoři: Gijs Van Elzakker , Jarmila Müllerová , Pavol Šutta , Miro Zeman
Abstrakt CZ: Série vrstev a-Si:H byly připraveny rf-PECVD depozicí s různým vodíkovým zředěním silanu. Pro určení strukturních vlastností byla použita rtg analýza, FTIR a Ramanova spektroskopie.
Abstrakt EN: A series of a-Si:H films has been deposited using rf-PECVD with varying hydrogen dilution of the silane source gas. XRD, FTIR and Raman spectroscopy were used to evaluate the structural properties of the films. A narrowing of the XRD first diffraction peak as well as a shift of the RAman TO Peak frequency to higher wavenumbers indicates that the structural order of the films increases with hydrogen dilution. To be able to utilize the enhanced properties of the a-Si:H deposited at high hydrogen dilution, the transition to the microcrystallline phase should be avoided. It was demonstrated that the structural phase of the Si:H solar cell absorber layer can be manipulated using a layer-by-layer process, ensuring that it remains amorphous even at high hydrogen to silane dilution ratios.
Klíčová slova

Zpět

Patička