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Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges

Citace: [] KARÁSKOVÁ, M., ZAJÍČKOVÁ, L., BURŠÍKOVÁ, V., FRANTA, D., NEČAS, D., BLÁHOVÁ, O., ŠPERKA, J. Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges. Surface & Coatings Technology, 2010, roč. 204, č. 12-13, s. 1997-2001. ISSN: 0257-8972
Druh: ČLÁNEK
Jazyk publikace: eng
Anglický název: Optical and mechanical characterization of ultrananocrystalline diamond films prepared in dual frequency discharges
Rok vydání: 2010
Autoři: Monika Karásková , Lenka Zajíčková , Vilma Buršíková , Daniel Franta , David Nečas , Doc. Ing. Olga Bláhová Ph.D. , Jiří Šperka
Abstrakt EN: Ultrananocrystalline diamond (UNCD) films were deposited directly on polished silicon substrates in microwave discharge (2.45 GHz) combined with rf capacitive plasma (13.56 MHz) ignited at the substrate electrode. The latter procedure resulted in the deposition of coating with the hardness of 70 GPa and very good fracture toughness. The analyses of optical measurement in UV-IR range confirmed the presence of 250 nm thick intermediate layer containing diamond like carbon and SiC materials.
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