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Mechanical properties of thin films deposited by TVA and G-TVA methods

Citace: [] STOICA, A., VLADOIU, R., MUSA, G., CIUPINA, V., CONTULOV, M., BURŠÍKOVÁ, V., BLÁHOVÁ, O. Mechanical properties of thin films deposited by TVA and G-TVA methods. Chemické Listy, 2011, roč. 105, č. S, s. 132-135. ISSN: 0009-2770
Druh: ČLÁNEK
Jazyk publikace: eng
Anglický název: Mechanical properties of thin films deposited by TVA and G-TVA methods
Rok vydání: 2011
Autoři: Adrian Stoica , Rodica Vladoiu , Geavit Musa , Victor Ciupina , Mirela Contulov , Vilma Buršíková , Doc. Ing. Olga Bláhová Ph.D.
Abstrakt EN: The Thermionic Vacuum Arc (TVA) plasma is a powerful technique able to growth thin films using solids as precursor in vacuum conditions. The mechanical properties of the films deposited were investigated. The described methods enable to prepare carbon films with wide range of mechanical properties from polymer-like carbon up to hard diamond-like carbon.
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