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Structure optimization of ZnO thin films for piezoelectric microgenerator

Citace: [] PRUŠÁKOVÁ, L., NOVÁK, P., KULHA, P., HUSÁK, M., ŠUTTA, P. Structure optimization of ZnO thin films for piezoelectric microgenerator. Garmisch-Partenkirchen, 2012.
Druh: PŘEDNÁŠKA, POSTER
Jazyk publikace: eng
Anglický název: Structure optimization of ZnO thin films for piezoelectric microgenerator
Rok vydání: 2012
Autoři: Ing. Lucie Prušáková , Ing. Petr Novák , Pavel Kulha , Miroslav Husák , Doc. RNDr. Pavol Šutta Ph.D. ,
Abstrakt EN: The paper presents design and fabrication process of piezoelectric generator with thin-film Zinc Oxide (ZnO) layer. The whole structure of piezoelectric cantilever beam harvester is composed of ZnO layer in between of two Al2O3 insulating layers and aluminium contacts. Such structure was prepared by combination of RF (13.56 MHz radio frequency) and DC magnetron sputtering using BOC Edwards coating system. The piezoelectric generator in single-cantilever beam configuration achieved maximum open-circuit voltage up to 1.25V at resonant frequency of 190 Hz.
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