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Design and fabrication of piezoelectric microgenerator with thin ZnO Layer

Citace: [] KULHA, P., PRUŠÁKOVÁ, L., NOVÁK, P., HUSÁK, M., ŠUTTA, P. Design and fabrication of piezoelectric microgenerator with thin ZnO Layer. Brno, 2012.
Druh: PŘEDNÁŠKA, POSTER
Jazyk publikace: eng
Anglický název: Design and fabrication of piezoelectric microgenerator with thin ZnO Layer
Rok vydání: 2012
Autoři: Pavel Kulha , Ing. Lucie Prušáková Ph.D. , Ing. Petr Novák Ph.D. , Miroslav Husák , Doc. RNDr. Pavol Šutta Ph.D.
Abstrakt EN: The paper presents design methodology and fabrication process of piezoelectric generator with thin-film Zinc Oxide (ZnO) layer. The whole structure of piezoelectric cantilever beam harvester is composed of ZnO layer in between two Al2O3 insulating layers and aluminium contacts. Such structures were prepared by the combination of RF and DC magnetron sputtering using BOC Edwards TF 600 coating system. The piezoelectric generator in single beam configuration achieves maximum open-circuit voltage up tu 1.25V at resonant frequency of 190 Hz.
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