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Comparison of efficiency of electrostatic micro-actuators for precise positioning

Citace:
ŠTARMAN, V., KACEROVSKÝ, J., JANSA, J., KARBAN, P., DOLEŽEL, I. Comparison of efficiency of electrostatic micro-actuators for precise positioning. In Electrical Engineering. Poznaň: Poznan university of technology, 2013. s. 29-34. ISBN: neuvedeno , ISSN: 1897-0737
Druh: STAŤ VE SBORNÍKU
Jazyk publikace: eng
Anglický název: Comparison of efficiency of electrostatic micro-actuators for precise positioning
Rok vydání: 2013
Místo konání: Poznaň
Název zdroje: Poznan university of technology
Autoři: Ing. Václav Štarman , Ing. Jan Kacerovský , Ing. Jindřich Jansa , Doc. Ing. Pavel Karban Ph.D. , Prof. Ing. Ivo Doležel CSc.
Abstrakt EN: Comparison of several types of electrostatic micro-actuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive higher-order finite element method, using a code developed by the authors. The methodology is illustrated by typical examples whose results are discussed.
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