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Electrostatic microactuators for precise positioning and comparison of their parameters

Citace:
ŠTARMAN, V., KACEROVSKÝ, J., JANSA, J., KARBAN, P., DOLEŽEL, I. Electrostatic microactuators for precise positioning and comparison of their parameters. In COMPUTER APPLICATIONS IN ELECTRICAL ENGINEERING. Poznaň: Poznan university of technology, 2013. s. 122-127. ISBN: 978-83-7775-322-4 , ISSN: 1508-4248
Druh: STAŤ VE SBORNÍKU
Jazyk publikace: eng
Anglický název: Electrostatic microactuators for precise positioning and comparison of their parameters
Rok vydání: 2013
Místo konání: Poznaň
Název zdroje: Poznan university of technology
Autoři: Ing. Václav Štarman , Ing. Jan Kacerovský , Ing. Jindřich Jansa , Doc. Ing. Pavel Karban Ph.D. , Prof. Ing. Ivo Doležel CSc.
Abstrakt EN: Comparison of several types of electrostatic microactuators is carried out, particularly with respect to their resultant force effects. The continuous mathematical model of such actuators is mostly described by the Laplace equation. In this paper, its numerical solution is performed by a fully adaptive highr-order finite element method, using a code developed by the authors. The methodoloby is illustrated with typical examples whose results are discussed.
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