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Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas

Citace: [] PAJDAROVÁ, A., VLČEK, J., BĚLSKÝ, P., MUSIL, J. Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas. In XXVI International Conference on Phenomena in Ionized Gases, Volume 1. Greifswald: Local Organizing Committee, 2003. s. 139-140. ISBN: 3-00-011689-3
Druh: STAŤ VE SBORNÍKU
Jazyk publikace: eng
Anglický název: Time-resolved optical emission spectroscopy of pulsed dc magnetron sputtering plasmas
Rok vydání: 2003
Místo konání: Greifswald
Název zdroje: Local Organizing Committee
Autoři: Andrea Dag Pajdarová , Jaroslav Vlček , Petr Bělský , Jindřich Musil
Abstrakt EN: Relative densities of cooper (target) atoms and ions, and argon (working gas) atoms and ions were investigated in front of a sputtered target and in a plasma bulk during voltage pulses and in pauses between them by means of time-resolved optical emission spectroscopy.
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